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Components Available are PROCESS TECHNOLOGY LTFH Teflon Filter
Housings (shown) and fluoropolymer and stainless steel Heat Exchangers
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Controllers Available are PID, Membrane style Process Controllers, Quick
Dump Rinser Controllers, Heater Sub-Panels and Process Timers. Also
available are custom configurations Shown: Temperature Timer Controller
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DI Water Heaters Designed for the ultra pure demands of the
semiconductor industry, ISE offers a full line PROCESS TECHNOLOGY/LUFRAN
de-ionized water heaters designed for the most demanding hot water
applications. Sizes range from 3 kW up to 260 kW Shown: Lufran Ultra Pure
Teflon DI Water Heater with DAC and CE Cabinet.
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Immersion Heaters Patented PROCESS TECHNOLOGY/LUFRAN N2
purge feature for extended service life with virtually any chemical heating
application. Compact design. Shown: Typical Teflon Immersion Bottom Heater
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In Line Chemical Heaters In line PROCESS TECHNOLOGYChemical
Heaters are available for virtually any chemistry and wet process application
(including the heating of solvents!). PROCESS TECHNOLOGY inline heaters
are manufactured of fluoropolymer and high purity quartz materials. Sizes range
from 0.5 kW to up to 13.5 kW. May be used at temperatures up to 180 degrees
Celsius (process and safety dependant) Shown: TIH Teflon In-Line
Chemical/DI Water Heater
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MEMS Process Tools Specifically designed Process Modules and Tools
include Quick Dump Rinsers with misting spray nozzles, Etch Stops and KOH
Process Baths Shown" 5" Single sided etch stop
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Process Modules Are available in a wide range of sizes, capacities and
materials of construction for virtually any process application. Shown: Heated
quartz process bath, 1 ea. 6" cassette capacity to 180 degrees Celsius
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Yield Engineering Systems (YES) manufactures processing equipment
to clean, cure, and coat semiconductor wafers, MEMS devices, biosensors and
medical slides.
YES provides their customers improved surface modification and coating
processes, not just precise equipment, to increase yields and extend the life
and performance of your devices.
YES high temperature vacuum cure ovens, chemical vapor deposition (CVD)
systems, and plasma etching and cleaning systems offer total control over your
process environment, so you get the results you want.
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