PROCESS TECHNOLOGY ETCH TECHTM SERIES CASCADE PROCESS BATHS Non-breakable
PFA tank. For use with integral in-tank heater or external inline heater.
Applications Include:
- Nitride etch/strip: Phosphoric Acid (H3PO4) and water (H2O)
- Sulfuric (H2SO4) process
- Hydrofluoric (HF) process • Buffered oxide etch (BOE) process (hydrofluoric and ammonium fluoride)
- Hydrochloric (HCL) process • SC1 (ammonium hydroxide and hydrogen peroxide)
- SC2 (hydrochloric and hydrogen peroxide)
Specifications:
Tank Sizes:
- Two 4", 5", 6", 8" (100, 125, 150, 200 mm) cassettes
- One 8" (200mm) cassette
Temperature range: Up to 180º C dependent on chemistry.
Construction:
- Unbreakable PFA inner and outer tanks.
- Inner tank sparger rails provides even chemical dispersion and false bottom on which carriers are set.
- Inner tank walls have serrated edges to prevent whirlpools.
- The fluoropolymer mid-frame assembly is suspended from the top deck for easy leveling of the process tank. This ensures
uniform cascading of the chemistry.
- Outer PFA weir for enhanced chemical and heat distribution.
- HalarÒ coated stainless steel outer structure for strength and rigidity.
- PTFE top deck assembly for added structural support.
- Air diverter located in the outer weir to prevent the formation of air pockets around the heater.
Standard features:
- Process thermocouple port • Outer weir thermocouple port • Liquid level port for N2 bubble sensor
- System overflow connection • Drain connection • Process tank leveling adjustments
- Flaretek® inlet connections for remote pump
Heater voltages available: 120 to 600 volts, single or three phase.
Options:
- Tank system can be integrated with existing control systems • PID or PLC Process Controller
- Integral fluoropolymer immersion heater and/or in-line heater (fluoropolymer or quartz available).
- Chemical dispensing manifold • Custom interfacing to match existing system.
- Manual, pneumatic or hydraulic operated lid • In-line filter chamber • PTFE condensing coil.
- Custom fitting of tank to match existing system
- Additional ports for level sensing and automatic chemical fill
- Wafer locater nest.
|
Shown Etch Tech, 1 ea. 8" cassette capacity
|
New! Filter Etch Bath (PB-f) The ISE Filter Etch Bath is engineered to offer filtration and temperature control of
virtually any chemistry from 10 to 90 degrees Celsius. +/- 1 degree C*. The Filter Etch Bath is ideally suited for
HF, BOE & KOH applications and will substantially increase the useful life of the chemistry. For BOE processes
it can typically offer a payback in several months. Standard and Optional features are noted below.
*Under certain conditions +/- 0.2ºC is attainable
Process Module Features:
- Natural Polypropylene, PVDF or Halar Construction
- Serrated Overflow 360º inner tank (weir)
- Clear PVC, drop down Cover
- Heat exchange coil
- Revolutionary Flow Linearization (patent pending)
- Speed Controlled, water cooled pump /Motor (1/2 hp)
- Pre-programmed ramp to prevent de-wetting of filters
- Manual Speed control
- Standard 10 inch 220 filter housing (filter not included)
- Full One (1) Year Warranty
- Pneumatic drain valve(s)
Capacity - Models are available to process from 1 ea. 4”, 5”, 6”, 8” or 2 ea. 4”, 5”, 6” or 8” wafer cassettes
Options:
- Temperature Timer Process Controller
- Temperature Controls Circulator
- Teflon UL listed Immersion Heater
|
|
Shown - PB16-f 1 ea. 6" cassette capacity, Halar
construction. non-heated
|
|
|
|
 |
|
|
|
Our Polymer Static Constant Temperature Baths are available in a wide variety of configurations. They are
engineered to reliably and efficiently heat various chemistries. Operating temperatures range from sub-ambient
to 185 degrees Celsius.
Standard features:
- Heater w/ overtemperature thermocouple
- Process thermocouple
- Process tank
Specifications:
Capacity:
- two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
- one ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette
Options include:
- Material of construction - Wetted materials include Teflon, PVDF, polypropylene, etc.
- Process applications include SC1, SC2, Wafer Clean, Strip, Nitride Etch, Metal Etch, KOH etch etc.
- Interior dimensions, wafer cassette capacity (size and number of cassettes).
- Drain valve or drain adapter.
- Magnetic Stirrer, N2 Bubblers.
- Covers (Hinged - lift off), Refluxors.
- Voltage, phase.
- PID Process Controllers with / without integral Timers.
|
|
 |
|
|
Shown: Teflon process bath
with Process Controller refulxor
and cover, 1 ea. 6" cassette
capacity
|
|
|
|
|
|
|
 |
|
|
|
Our Quartz Static Constant Temperature Bath is engineered to heat virtually any
chemistry (except HF, KOH and similar chemistries) up to 180 degrees Celsius.
+/- 1 degree C. Included with each bath is a process controller (can be deleted
for a reduction in price) and a host of safety features as noted below.
Standard Features
Module
- Flame Polished Quartz Vessel
- Flame Retardant Polypropylene Outer Enclosure (housing)
- High Efficiency, 5-Sided, 208v Heater (kW dependant on size ordered)
- Separate Internal, J' Type Thermocouple, 15 ft.
- Dual Safety Snap Switches
- Power Cord Harness, 15 ft.
- Alumina Silica Insulation (eliminates flame space)
Safety Features
- Teflon Process Thermocouple (enables high temp setting)
- Separate Internal J type overtemperature Thermocouple
- Dual Safety Snap Switches
|
|
|
Specifications:
Capacity:
- two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
- one ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette
Options include:
- Process applications include SC1, SC2, Wafer Clean, Strip, Nitride Etch,
- Interior dimensions, wafer cassette capacity (size and number of
cassettes).
- Drain valve or drain adapter.
- Magnetic Stirrer, N2 Bubblers.
- Covers (Hinged - lift off), Refluxors.
- Voltage, phase.
- PID Process Controllers with / without integral Timers.
|
|
|
|
 |
|
|
|
 |
|
|
|
Shown: Quartz process bath with Process Controller
refulxor and cover, 1 ea. 6" cassette capacity
|
|
|
|
Our Quick Dump Rinsers and Cascades are available in a wide variety of configurations. They are engineered to
improve the quality and effectiveness of your rinse process.
Standard features:
- 2 ea. spray bars
- 2 ea. DI water valves
- 1 or 2 ea. dump valves (dependent on size ordered)
- Drop away cover
Specifications:
Capacity
- two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
- one ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette
Material of construction: Polypropylene of PVDF (dependent on model ordered)
Options include:
- Material of construction - Wetted materials include Teflon, PVDF, and polypropylene etc.
- Process applications include cold and hot DI rinse
- Interior dimensions, wafer cassette capacity (size and number of cassettes)
- Single or reclaim double door (applies to Quick Dump Rinsers only)
- Multiple rinse stages / wells (applies to Cascades only)
- N2 Bubbler
- Covers (Hinged - lift off)
- Voltage, phase
- PID QDR Controller
|
|
 |
|
|
Shown: Polypropylene with
QDR Controller, drop down
cover, 2 ea. 6" cassette capacity
|
|
|
|
|
|
|
 |
|
|
Our Stainless Steel Static Constant Temperature Bath is engineered to heat solvent based process
chemistries. Included with each bath is a process controller (can be deleted for a reduction in price) and a host
of safety features as noted below.
Standard Features
Module
- 316 Electropolished Stainless Steel Vessel
- Tank designed to meet freeboard ratio
- Flame Retardant Polypropylene Outer Enclosure (housing)
- High Efficiency, 5-Sided, 208v Heater (kW dependant on size ordered)
- Separate Internal, J' Type Thermocouple, 15 ft.
- Dual Safety Snap Switches
- Power Cord Harness, 15 ft.
Safety Features
- Teflon Process Thermocouple (enables high temp setting)
- Separate Internal J type overtemperature Thermocouple
- Dual Safety Snap Switches
Specifications:
Capacity:
- two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
- one ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette
Options include:
- Interior dimensions, wafer cassette capacity (size and number of cassettes).
- Drain valve or drain adapter.
- Magnetic Stirrer, N2 Bubblers.
- Covers (Hinged - lift off), Refluxors.
- Voltage, phase.
- PID Process Controllers with / without integral Timers.
|
|
New! Now available from ISE is sales and support of the Lufran / Process Technology LTFE - High
Temperature Filter Etch Bath. ISE has distributed, installed and serviced Lufran LTFE High Temperature Filter
Etch Bath's since 1993
The Lufran LTFE High Temperature Filter Etch Bath was designed for use H3P04, SC1, SC2, KOH etc. to 180
Celsius and features:
- 2 ea. 4, 5 or 6" or single 8" wafer cassette capacity
- 360 degree, PFA Teflon overflow weir w/ leveling feature.
- Inner Molded PFA Teflon Tank.
- PTFE Teflon Heater with patented (patent numbers 4,553-024-4,158 764) N2 purge feature.
- 208 VAC, single phase.
- 4.5 kW Teflon Immersion Heater.
- 2 ea. J-type over-temperature thermocouple, thermal cutoff switch
- 1 ea. Teflon process thermocouple i) Liquid level sensor
- All Teflon pump with 1⁄2 hp water cooled motor k) All Teflon Filter Housing (filter not included, optional see
below)
- Flow enclosure with Heater purge controls, bubble sensor, motor cooling and purge controls.
Process Control Package
- Digital Self tuning, microprocessor based PID Temperature Controller. Membrane control panel, LED
readout.
- Separate 208VAC Power Module
- Integral Process Timer
- Audio and visual alarms
- Access code.
- Nitrogen purge regulator and flow meter
Available components/services include but are not limited to:
- Process Controllers and Power Supplies
- LTFE Teflon Process Heaters
- Process Thermocouples
- Quartz or Teflon Weir
- Water Cooled Motor (SM-3) Rebuild
- LT1-3 Teflon Impeller (limited availability)
- Flow Panel
- Teflon Condensing Ring
- Filter cap, Impeller removal tools
- Various sub-components (fittings, tubing, manifolds etc. )
Future components to be offered include:
- New SM-3 Water Cooled Motor
- Dual 6" capacity LTFE High Temperature Filter Etch Bath (LTFE-6002-S/P)
- LT1-3 Teflon Impeller
|
|
|
